全国统一电话
| Czochralski | Float Zone | Float Zone |
Diameter | 100-150 mm | 50-150 mm* | 100-150 mm* |
Crystal orientation | <100> <111> | <100> <111> | <100> <111> |
Orientation accuracy | <0.5° | <0.5° | <0.5° |
Type and dopant | Undoped, n-type, | Undoped, n-type, | Undoped, n-type, |
Dopant | As, B, P, and Sb | P, B | P, B |
Bulk resistivity | 0.001-60 | 1-30,000 | 1-30,000 |
Bulk lifetime | >20 µs | >1,000 µs | >1,000 µs |
Wafer thickness | 200-1,500 µm | 200-1,500 µm | 200-1,500 µm |
Wafer thickness | ±15 µm | ±15 µm | ±5 µm |
TTV | <5 µm or <9 µm | <5 µm or <9 µm | <2.5 µm |
TIR | <3 µm | <3 µm | <1 µm |
Wafer surface finish | Single side polished, | Single side | Double side |